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Micro Mechanical Milling

Mechanical micromachining by drilling, milling and slotting 163 by micro slotting, minimum sizes of trenches can be reduced to about 15 m in width at an aspect ratio of about ten fig.6.Such dimensions cannot be achieved by micro milling fig.7.Fig.6.Pmma trenches about 15 m width, 150 m in depth.Fig.7.

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